Virtual contest is a way to take part in past contest, as close as possible to participation on time. It is supported only ACM-ICPC mode for virtual contests.
If you've seen these problems, a virtual contest is not for you - solve these problems in the archive.
If you just want to solve some problem from a contest, a virtual contest is not for you - solve this problem in the archive.
Never use someone else's code, read the tutorials or communicate with other person during a virtual contest.
Jzzhu have n non-negative integers a1, a2, ..., an. We will call a sequence of indexes i1, i2, ..., ik(1 ≤ i1 < i2 < ... < ik ≤ n) a group of size k.
Jzzhu wonders, how many groups exists such that ai1 & ai2 & ... & aik = 0(1 ≤ k ≤ n)? Help him and print this number modulo 1000000007(109 + 7). Operation x & y denotes bitwise AND operation of two numbers.
The first line contains a single integer n(1 ≤ n ≤ 106). The second line contains n integers a1, a2, ..., an(0 ≤ ai ≤ 106).
Output a single integer representing the number of required groups modulo 1000000007(109 + 7).
3 2 3 3
4 0 1 2 3
6 5 2 0 5 2 1
Codeforces (c) Copyright 2010-2017 Mike Mirzayanov